Problem svgcoat 2002-09-12 12:21:29: remaining resist after 5 mm ebr

amyers at snf.stanford.edu amyers at snf.stanford.edu
Thu Sep 12 12:21:32 PDT 2002


I noticed that some of the wafers had resist in the ebr region when  I tried program 8 with 7 arm for the ebr step 5




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