From sigari at snf.stanford.edu Mon Aug 4 04:21:42 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Aug 4, 2003 4:21:42 PM Subject: Problem svgcoat 2003-08-04 16:21:40: Report Problem for svgcoat Message-ID: the edge bead removal removes a large ring of PR from the edge compared to the past. Wafers don't seem to be centered well when this program is used. From martinez at snf.stanford.edu Mon Aug 4 04:46:25 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 4, 2003 4:46:25 PM Subject: Problem svgcoat 2003-08-04 16:21:40: Report Clear for svgcoat Message-ID: adj ebr nozzle position, cycled test wafers. ready for use From jleu at snf.stanford.edu Sat Aug 9 10:58:21 2003 From: jleu at snf.stanford.edu (jleu at snf.stanford.edu) Date: Aug 9, 2003 10:58:21 PM Subject: Problem svgcoat 2003-08-09 22:58:19: Report Problem for svgcoat Message-ID: After pressing start, nothing happens. From martinez at snf.stanford.edu Mon Aug 11 08:56:18 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 11, 2003 8:56:18 AM Subject: Problem svgcoat 2003-08-09 22:58:19: Report Clear for svgcoat Message-ID: track is in use. no prblem found From yyao at snf.stanford.edu Thu Aug 14 01:55:38 2003 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Aug 14, 2003 1:55:38 PM Subject: Problem svgcoat 2003-08-14 13:55:37: Report Problem for svgcoat Message-ID: Sometimes, wafers are not levelled on the hotplate: one edge stays on the top of the metal rod and another edge is placed below the metal rod. From martinez at snf.stanford.edu Thu Aug 14 02:10:25 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 14, 2003 2:10:25 PM Subject: Problem svgcoat 2003-08-14 13:55:37: Report Clear for svgcoat Message-ID: adj rail height, cycled wafers. ok now