Problem svgcoat 2003-08-04 16:21:40: Report Problem for svgcoat

sigari at snf.stanford.edu sigari at snf.stanford.edu
Mon Aug 4 04:21:42 PDT 2003


the edge bead removal removes a large ring of PR from the edge compared to the past. Wafers don't seem to be centered well when this program is used.




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