From mahnaz at snf.stanford.edu  Mon Dec  1 17:21:36 2003
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Mon, 1 Dec 2003 17:21:36 -0800
Subject: Problem svgcoat 2003-12-01 17:21:35: 1 um, bad spin, ebr splash
Message-ID: <mailman.650.1357938702.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Dec  2 12:03:20 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 2 Dec 2003 12:03:20 -0800
Subject: Problem svgcoat 2003-12-01 17:21:35: 1 um, bad spin, ebr splash
Message-ID: <mailman.651.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

PM Completed , tested wafers , good uniformity and EBR
Ok to use.  



From martinez at snf.stanford.edu  Wed Dec  3 16:41:58 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Wed, 3 Dec 2003 16:41:58 -0800
Subject: Comment svgcoat 2003-12-03 16:41:57: svg coat2
Message-ID: <mailman.652.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

loaner pump installed and calibrated for uniformity and
thickness for spr 220-3 photoresist



From tkramer at snf.stanford.edu  Wed Dec 10 16:26:09 2003
From: tkramer at snf.stanford.edu (tkramer at snf.stanford.edu)
Date: Wed, 10 Dec 2003 16:26:09 -0800
Subject: Problem svgcoat 2003-12-10 16:26:08: SPR220 7um was lumpy
Message-ID: <mailman.653.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

Getting poor uniformity using SRP-220 in program 6



From vilanova at snf.stanford.edu  Thu Dec 11 14:53:51 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 11 Dec 2003 14:53:51 -0800
Subject: Comment svgcoat 2003-12-03 16:41:57: svg coat2
Message-ID: <mailman.654.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

problem cleared



From vilanova at snf.stanford.edu  Thu Dec 11 14:54:52 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 11 Dec 2003 14:54:52 -0800
Subject: Problem svgcoat 2003-12-10 16:26:08: SPR220 7um was lumpy
Message-ID: <mailman.655.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

Cleaned nozzle, purged line , adjusted nozzle and hose height
cycled wafers, ready to use. 



From amohan at snf.stanford.edu  Mon Dec 15 12:46:52 2003
From: amohan at snf.stanford.edu (amohan at snf.stanford.edu)
Date: Mon, 15 Dec 2003 12:46:52 -0800
Subject: Problem svgcoat 2003-12-15 12:46:52: 
Message-ID: <mailman.656.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

Wafer is getting stuck -- PR on the chuck - 



From vilanova at snf.stanford.edu  Mon Dec 15 13:44:08 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 15 Dec 2003 13:44:08 -0800
Subject: Problem svgcoat 2003-12-15 12:46:52: 
Message-ID: <mailman.657.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

Cleaned HMDS hotplate. ok to use



From emes at snf.stanford.edu  Mon Dec 15 18:36:07 2003
From: emes at snf.stanford.edu (emes at snf.stanford.edu)
Date: Mon, 15 Dec 2003 18:36:07 -0800
Subject: Problem svgcoat 2003-12-15 18:36:06: EBR for track 1 is empty
Message-ID: <mailman.658.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

EBR for track 1 is empty.....or at least it does not
dispense
It is Probably not properlly adjusted, since it stopped
despensing before I could finish adjusting it.



From vilanova at snf.stanford.edu  Tue Dec 16 07:47:38 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 16 Dec 2003 07:47:38 -0800
Subject: Problem svgcoat 2003-12-15 18:36:06: EBR for track 1 is empty
Message-ID: <mailman.659.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

Plenty of EBR in canister, the problem was that someone
had changed the EBR ARM  programs  all over .
CYCLED WAFERS , OK TO USE.