From mahnaz at snf.stanford.edu Fri Jan 3 10:12:43 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 3, 2003 10:12:43 AM Subject: Shutdown svgcoat 2003-01-03 10:12:41: all the recipes are gone Message-ID: From mahnaz at snf.stanford.edu Fri Jan 3 10:53:06 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 3, 2003 10:53:06 AM Subject: Shutdown svgcoat 2003-01-03 10:53:05: Not calibrated for any thing Message-ID: No recipes, major issues with bake and dispens. I programmed the 1um and 1.6 um but something is totally out of wack. From mahnaz at snf.stanford.edu Fri Jan 3 05:19:19 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 3, 2003 5:19:19 PM Subject: Shutdown svgcoat 2003-01-03 10:53:05: Not calibrated for any thing Message-ID: From mahnaz at snf.stanford.edu Fri Jan 3 05:19:38 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 3, 2003 5:19:38 PM Subject: Shutdown svgcoat 2003-01-03 10:12:41: all the recipes are gone Message-ID: From mahnaz at snf.stanford.edu Fri Jan 3 05:21:53 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 3, 2003 5:21:53 PM Subject: Shutdown svgcoat 2003-01-03 17:21:52: Recipes are gone and hot plate is not functioning Message-ID: From mahnaz at snf.stanford.edu Fri Jan 3 05:24:51 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 3, 2003 5:24:51 PM Subject: Shutdown svgcoat 2003-01-03 17:24:49: hot plate issues Message-ID: From shott at snf.stanford.edu Fri Jan 3 05:27:01 2003 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Jan 3, 2003 5:27:01 PM Subject: Shutdown svgcoat 2003-01-03 17:21:52: Recipes are gone and hot plate is not functioning Message-ID: From mahnaz at snf.stanford.edu Fri Jan 3 05:31:15 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 3, 2003 5:31:15 PM Subject: Shutdown svgcoat 2003-01-03 17:31:14: recipes are gone Message-ID: From martinez at snf.stanford.edu Mon Jan 6 03:31:04 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 6, 2003 3:31:04 PM Subject: Shutdown svgcoat 2003-01-03 17:31:14: recipes are gone Message-ID: all repairs completed, system has been qualified for 1.0u & 1.6u (prog 7,8) From martinez at snf.stanford.edu Mon Jan 6 03:31:49 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 6, 2003 3:31:49 PM Subject: Shutdown svgcoat 2003-01-03 17:24:49: hot plate issues Message-ID: issues resolved ok to use From mahnaz at snf.stanford.edu Thu Jan 9 10:55:46 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 9, 2003 10:55:46 AM Subject: Problem svgcoat 2003-01-09 10:55:44: non uniformity on program 4, bad dispense Message-ID: From martinez at snf.stanford.edu Thu Jan 9 02:25:16 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 9, 2003 2:25:16 PM Subject: Problem svgcoat 2003-01-09 10:55:44: non uniformity on program 4, bad dispense Message-ID: cleaned resist from h.s. motor, calibrated h.s. motor to 9.9krpm cycled wafers prog#4. ready for use From quickwin at snf.stanford.edu Sun Jan 12 10:38:01 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Jan 12, 2003 10:38:01 AM Subject: Problem svgcoat 2003-01-12 10:38:00: wafer got caught in receiving cassette Message-ID: From vilanova at snf.stanford.edu Mon Jan 13 07:54:08 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 13, 2003 7:54:08 AM Subject: Problem svgcoat 2003-01-12 10:38:00: wafer got caught in receiving cassette Message-ID: User Error, No problem Found, After Running Several wafers the track is working fine. From quickwin at snf.stanford.edu Mon Jan 13 08:25:21 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Jan 13, 2003 8:25:21 PM Subject: Problem svgcoat 2003-01-13 20:25:20: wafer getting stuck in receiving cassette Message-ID: From martinez at snf.stanford.edu Tue Jan 14 09:28:46 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 14, 2003 9:28:46 AM Subject: Problem svgcoat 2003-01-13 20:25:20: wafer getting stuck in receiving cassette Message-ID: adj chill plate sensor, cycled wafers. ready for use From martinez at snf.stanford.edu Thu Jan 23 01:21:50 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 23, 2003 1:21:50 PM Subject: Shutdown svgcoat 2003-01-23 13:21:49: wpm Message-ID: From martinez at snf.stanford.edu Thu Jan 23 02:27:03 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 23, 2003 2:27:03 PM Subject: Shutdown svgcoat 2003-01-23 13:21:49: wpm Message-ID: weekly pm done From kjliu at snf.stanford.edu Thu Jan 23 09:10:00 2003 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: Jan 23, 2003 9:10:00 PM Subject: Problem svgcoat 2003-01-23 21:09:58: prime belts move slow Message-ID: prime station belts move very slow From vilanova at snf.stanford.edu Fri Jan 24 07:44:54 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 24, 2003 7:44:54 AM Subject: Problem svgcoat 2003-01-23 21:09:58: prime belts move slow Message-ID: The prime belt i sworking at a normal speed. User Error Ok to use . From hansen at snf.stanford.edu Fri Jan 24 11:49:35 2003 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Jan 24, 2003 11:49:35 AM Subject: Problem svgcoat 2003-01-24 11:49:34: wafer won't stop at coat station Message-ID: same problem as svgcoat2. Actuator that stops and centers wafer on coating chuck is not moving. From martinez at snf.stanford.edu Fri Jan 24 01:01:05 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 24, 2003 1:01:05 PM Subject: Problem svgcoat 2003-01-24 11:49:34: wafer won't stop at coat station Message-ID: N2 restored. cycled wafers. ready for use From evelyn at snf.stanford.edu Wed Jan 29 10:25:02 2003 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Jan 29, 2003 10:25:02 AM Subject: Problem svgcoat 2003-01-29 10:25:00: broke wafer Message-ID: wafer broke on the post bake plate From martinez at snf.stanford.edu Wed Jan 29 10:27:36 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 29, 2003 10:27:36 AM Subject: Problem svgcoat 2003-01-29 10:25:00: broke wafer Message-ID: cleaned broken pieces cycled test wafer ok to use From martinez at snf.stanford.edu Fri Jan 31 09:35:31 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 31, 2003 9:35:31 AM Subject: Shutdown svgcoat 2003-01-31 09:35:30: wpm Message-ID: From martinez at snf.stanford.edu Fri Jan 31 10:12:56 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 31, 2003 10:12:56 AM Subject: Shutdown svgcoat 2003-01-31 09:35:30: wpm Message-ID: weekly pm done