Problem svgcoat 2003-01-09 10:55:44: non uniformity on program 4, bad dispense

martinez at snf.stanford.edu martinez at snf.stanford.edu
Thu Jan 9 02:25:16 PST 2003


cleaned resist from h.s. motor, calibrated h.s. motor to 9.9krpm
cycled wafers prog#4. ready for use




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