Problem svgcoat 2003-01-29 10:25:00: broke wafer
evelyn at snf.stanford.edu
evelyn at snf.stanford.edu
Wed Jan 29 10:25:02 PST 2003
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Problem svgcoat 2003-01-24 11:49:34: wafer won't stop at coat station
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Problem svgcoat 2003-01-29 10:25:00: broke wafer
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wafer broke on the post bake plate
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Problem svgcoat 2003-01-24 11:49:34: wafer won't stop at coat station
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Problem svgcoat 2003-01-29 10:25:00: broke wafer
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