From beckwith at snf.stanford.edu Thu Jul 3 11:01:47 2003 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 3, 2003 11:01:47 AM Subject: Problem svgcoat 2003-07-03 11:01:47: Report Problem for svgcoat Message-ID: 1. uniformity not uniform; some wafers are good, some are not. 2. air bubbles in the ebr tube 3.. wafer never progresses to the bake stage. I had to bake them on svgcoat2. From martinez at snf.stanford.edu Thu Jul 3 11:07:48 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 3, 2003 11:07:48 AM Subject: Shutdown svgcoat 2003-07-03 11:07:46: Report Shutdown for svgcoat Message-ID: shut down. hot plate stepper motor failure. From martinez at snf.stanford.edu Thu Jul 3 02:50:53 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 3, 2003 2:50:53 PM Subject: Shutdown svgcoat 2003-07-03 11:07:46: Report Clear for svgcoat Message-ID: adj hp wafer carrier up pos sensor, cycled 12 wafers ready for use From martinez at snf.stanford.edu Thu Jul 3 02:51:45 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 3, 2003 2:51:45 PM Subject: Problem svgcoat 2003-07-03 11:01:47: Report Clear for svgcoat Message-ID: cleaned nozzle, purged line. ready nfor use From mattlin at snf.stanford.edu Tue Jul 8 10:10:06 2003 From: mattlin at snf.stanford.edu (mattlin at snf.stanford.edu) Date: Jul 8, 2003 10:10:06 PM Subject: Problem svgcoat 2003-07-08 22:10:05: Report Problem for svgcoat Message-ID: Accidentally ran a dummy wafer upside down. Resist was burned onto the hotplate at the prime station. From vilanova at snf.stanford.edu Wed Jul 9 07:44:49 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 9, 2003 7:44:49 AM Subject: Problem svgcoat 2003-07-08 22:10:05: Report Clear for svgcoat Message-ID: cleaned up hotplates. ok to use. From okilic at snf.stanford.edu Wed Jul 16 04:02:57 2003 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Jul 16, 2003 4:02:57 AM Subject: Problem svgcoat 2003-07-16 04:02:55: Report Problem for svgcoat Message-ID: While moving a stuck wafer with a tweezer, the wafer fell down into the machine. I couldn't locate the wafer but both tracks went on without a problem. From vilanova at snf.stanford.edu Wed Jul 16 07:39:48 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 16, 2003 7:39:48 AM Subject: Problem svgcoat 2003-07-16 04:02:55: Report Clear for svgcoat Message-ID: re-initialized system, tested ok , ready to use. From ericp at snf.stanford.edu Sat Jul 26 05:00:25 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Jul 26, 2003 5:00:25 PM Subject: Problem svgcoat 2003-07-26 17:00:23: svgcoat HMDS out. Message-ID: HMDS on track one is out and resist is not sticking. Use oven prime or use track 2. From ericp at snf.stanford.edu Sat Jul 26 05:02:35 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Jul 26, 2003 5:02:35 PM Subject: Problem svgcoat 2003-07-26 17:02:34: svgcoat - Prime ok now Message-ID: N2 connector had fallen off. It should be back to normal. From vilanova at snf.stanford.edu Mon Jul 28 07:45:25 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 28, 2003 7:45:25 AM Subject: Problem svgcoat 2003-07-26 17:02:34: Report Clear for svgcoat Message-ID: Checked system ,N2 Ok, checked HMDS there was plenty of it ran wafers, system ok , ready to use. From vilanova at snf.stanford.edu Mon Jul 28 07:45:51 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 28, 2003 7:45:51 AM Subject: Problem svgcoat 2003-07-26 17:00:23: Report Clear for svgcoat Message-ID: checked system, ran wafers , system ok, ready to use. From kacraig at snf.stanford.edu Mon Jul 28 04:40:18 2003 From: kacraig at snf.stanford.edu (kacraig at snf.stanford.edu) Date: Jul 28, 2003 4:40:18 PM Subject: Problem svgcoat 2003-07-28 16:40:17: Report Problem for svgcoat Message-ID: wafers get stuck on track in prime oven From vilanova at snf.stanford.edu Tue Jul 29 07:41:36 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 29, 2003 7:41:36 AM Subject: Problem svgcoat 2003-07-28 16:40:17: Report Clear for svgcoat Message-ID: somebody changed the hotplate temperature and hotplate was not hot enough to continue to the next step. please do not change the temperature on any of the coaters or developers hotplates. ok to use.