Problem svgcoat 2003-07-03 11:01:47: Report Problem for svgcoat

beckwith at beckwith at
Thu Jul 3 11:01:47 PDT 2003

1. uniformity not uniform; some wafers are good, some are not.
2. air bubbles in the ebr tube
3.. wafer never progresses to the bake stage. I had to bake them on svgcoat2.

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