Problem svgcoat 2003-07-16 04:02:55: Report Problem for svgcoat

okilic at snf.stanford.edu okilic at snf.stanford.edu
Wed Jul 16 04:02:57 PDT 2003


While moving a stuck wafer with a tweezer, the wafer fell down into the machine. I couldn't locate the wafer but both tracks went on without a problem.




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