From jtsai at snf.stanford.edu  Fri Jun 13 10:20:34 2003
From: jtsai at snf.stanford.edu (jtsai at snf.stanford.edu)
Date: Jun 13, 2003 10:20:34 AM
Subject: Problem svgcoat 2003-06-13 10:20:33: Report Problem for svgcoat
Message-ID: <mailman.610.1357938701.25882.svgcoat-pcs@snf.stanford.edu>

the HMDS priming doesn't work. The wafer stays on the prime stage for 10 sec. then the alarm sounds.



From vilanova at snf.stanford.edu  Fri Jun 13 10:41:16 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jun 13, 2003 10:41:16 AM
Subject: Problem svgcoat 2003-06-13 10:20:33: Report Clear for svgcoat
Message-ID: <mailman.611.1357938701.25882.svgcoat-pcs@snf.stanford.edu>

rails was out of place , Fixed it, ok to use