From enwang at snf.stanford.edu Tue May 6 08:23:22 2003 From: enwang at snf.stanford.edu (enwang at snf.stanford.edu) Date: May 6, 2003 8:23:22 AM Subject: Problem svgcoat 2003-05-06 08:23:21: Report Problem for svgcoat Message-ID: prime temep[erature very low ~25C From vilanova at snf.stanford.edu Tue May 6 09:15:02 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 6, 2003 9:15:02 AM Subject: Problem svgcoat 2003-05-06 08:23:21: Report Clear for svgcoat Message-ID: reseted temperature button ,tested , ok to use now. From bwacker at snf.stanford.edu Tue May 6 01:13:30 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: May 6, 2003 1:13:30 PM Subject: Shutdown svgcoat 2003-05-06 13:13:29: Report Shutdown for svgcoat Message-ID: The chuck is off center. It broke 2 of my wafers. Also, wafer censor on the resist coating chuck is mulfunctioning. Barbara From vilanova at snf.stanford.edu Tue May 6 02:06:30 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 6, 2003 2:06:30 PM Subject: Shutdown svgcoat 2003-05-06 13:13:29: Report Clear for svgcoat Message-ID: calibrated spindle and cycled wafers. From iwjung at snf.stanford.edu Wed May 14 04:41:03 2003 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: May 14, 2003 4:41:03 PM Subject: Problem svgcoat 2003-05-14 16:41:02: Report Problem for svgcoat Message-ID: There is a problem with the bake step. Alarm goes off and cool plate won't transfer. From vilanova at snf.stanford.edu Thu May 15 07:46:54 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 15, 2003 7:46:54 AM Subject: Problem svgcoat 2003-05-14 16:41:02: Report Clear for svgcoat Message-ID: I ran several wafers with the different bake programs and I couldnt repeat the problem, Ok to use.