From amyers at snf.stanford.edu  Wed Oct  8 11:21:43 2003
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Oct 8, 2003 11:21:43 AM
Subject: Problem svgcoat 2003-10-08 11:21:42: Report Problem for svgcoat
Message-ID: <mailman.634.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

prine station lifter mechanism is not receeding all the way



From vilanova at snf.stanford.edu  Wed Oct  8 11:33:57 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Oct 8, 2003 11:33:57 AM
Subject: Problem svgcoat 2003-10-08 11:21:42: Report Clear for svgcoat
Message-ID: <mailman.635.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

Prime hotplate rail  Adjusted, tested,ready to use.



From mahnaz at snf.stanford.edu  Mon Oct 20 03:08:18 2003
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Oct 20, 2003 3:08:18 PM
Subject: Problem svgcoat 2003-10-20 15:08:18: Report Problem for svgcoat
Message-ID: <mailman.636.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

I ran totall of 10 wafers most wafers have raggedy EBR edges.



From vilanova at snf.stanford.edu  Tue Oct 21 07:56:21 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Oct 21, 2003 7:56:21 AM
Subject: Problem svgcoat 2003-10-20 15:08:18: Report Clear for svgcoat
Message-ID: <mailman.637.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

adj EBR flow, ok to use. 



From hopcroft at snf.stanford.edu  Thu Oct 23 00:30:38 2003
From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu)
Date: Thu, 23 Oct 2003 00:30:38 -0700
Subject: Problem svgcoat 2003-10-23 00:30:37: svgcoat - gunk on hotplate
Message-ID: <mailman.638.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

resist on pre-bake hotplate, causing loss of vacuum.



From jtsai at snf.stanford.edu  Thu Oct 23 06:25:23 2003
From: jtsai at snf.stanford.edu (jtsai at snf.stanford.edu)
Date: Thu, 23 Oct 2003 06:25:23 -0700
Subject: Problem svgcoat 2003-10-23 06:25:22: Report Problem for svgcoat
Message-ID: <mailman.639.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

vapor prime can't continue the process after the first step



From vilanova at snf.stanford.edu  Thu Oct 23 07:28:56 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 23 Oct 2003 07:28:56 -0700
Subject: Problem svgcoat 2003-10-23 00:30:37: Report Clear for svgcoat
Message-ID: <mailman.640.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

cleaned prime hotplate ( this is the fourth time I do that  please do not run wafers UPSIDE DOWN ) system ok, ready to use.



From vilanova at snf.stanford.edu  Thu Oct 23 07:31:24 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 23 Oct 2003 07:31:24 -0700
Subject: Problem svgcoat 2003-10-23 06:25:22: Report Clear for svgcoat
Message-ID: <mailman.641.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

Cleaned Hotplate, ready to use. ( PLEASE DO NOT RUN 
wafers upside down , today is the fourth day in a row that I find and I have to   cleaned the prime hotplate )



From sandrews at snf.stanford.edu  Thu Oct 23 15:47:57 2003
From: sandrews at snf.stanford.edu (sandrews at snf.stanford.edu)
Date: Thu, 23 Oct 2003 15:47:57 -0700
Subject: Problem svgcoat 2003-10-23 15:47:56: Report Problem for svgcoat
Message-ID: <mailman.642.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

After enabling, but before running any wafers, I noticed the coat program says "upstream not ready"   



From martinez at snf.stanford.edu  Thu Oct 23 16:10:27 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Thu, 23 Oct 2003 16:10:27 -0700
Subject: Problem svgcoat 2003-10-23 15:47:56: Report Clear for svgcoat
Message-ID: <mailman.643.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

rset controller, cycled test wafers. ok now



From naiqian at snf.stanford.edu  Tue Oct 28 23:23:10 2003
From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu)
Date: Tue, 28 Oct 2003 23:23:10 -0800
Subject: Problem svgcoat 2003-10-28 23:23:10: Report Problem for svgcoat
Message-ID: <mailman.644.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

tranferring belt in prime oven does not move.



From vilanova at snf.stanford.edu  Wed Oct 29 07:35:21 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 29 Oct 2003 07:35:21 -0800
Subject: Problem svgcoat 2003-10-28 23:23:10: Report Clear for svgcoat
Message-ID: <mailman.645.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

operator error , system working fine, ok to use.



From naiqian at snf.stanford.edu  Wed Oct 29 23:02:51 2003
From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu)
Date: Wed, 29 Oct 2003 23:02:51 -0800
Subject: Problem svgcoat 2003-10-29 23:02:50: Report Problem for svgcoat
Message-ID: <mailman.646.1357938702.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Oct 30 08:03:58 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 30 Oct 2003 08:03:58 -0800
Subject: Problem svgcoat 2003-10-29 23:02:50: Report Clear for svgcoat
Message-ID: <mailman.647.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

Operator Error,  no problem reported , ran wafers and track
works  fine, ok to use.