From vilanova at snf.stanford.edu Thu Apr 1 14:58:47 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Apr 2004 14:58:47 -0800 Subject: Problem svgcoat 2004-03-29 16:50:52: splashback Message-ID: replaced bottom ebr nozzle, adjusted EBR arm, cycled wafers ok to use. Please Do not change any of the EBR ARm Programs!!!!! From pethe at snf.stanford.edu Fri Apr 2 17:28:59 2004 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Fri, 2 Apr 2004 17:28:59 -0800 Subject: Problem svgcoat 2004-04-02 17:28:59: hmds track has crud on it Message-ID: While running an svgcoat dummy, it got stuck to the hmds plate. On recovering the wafer, we found some resist on the back of the dummy. There is also a mark on the plate corresponding to the wafer location. Please be aware that this could potentially get onto the backside of your wafer. From vilanova at snf.stanford.edu Mon Apr 5 07:30:39 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Apr 2004 07:30:39 -0700 Subject: Problem svgcoat 2004-04-02 17:28:59: hmds track has crud on it Message-ID: cleaned Resist from HMDS hotplate , ready to use. From vilanova at snf.stanford.edu Mon Apr 5 07:30:57 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Apr 2004 07:30:57 -0700 Subject: Comment svgcoat 2004-03-30 23:15:54: the wafer stopped at the spinner Message-ID: cleaned HMDS Hotplate , ok to use . From mahnaz at snf.stanford.edu Mon Apr 5 15:02:15 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Apr 2004 15:02:15 -0700 Subject: Problem svgcoat 2004-04-05 15:02:14: very very bad EBR. Message-ID: almost in the center of wafers. From vilanova at snf.stanford.edu Tue Apr 6 07:33:30 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Apr 2004 07:33:30 -0700 Subject: Problem svgcoat 2004-04-05 15:02:14: very very bad EBR. Message-ID: Cleaned EBR Nozzle and dispense hoses, cycled wafers Ok to use. From uli at snf.stanford.edu Wed Apr 7 10:59:30 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 7 Apr 2004 10:59:30 -0700 Subject: Problem svgcoat 2004-04-07 10:59:30: EBR problem Message-ID: coat prog 7 EBR is 10 mm instead of 5 mm From beckwith at snf.stanford.edu Wed Apr 7 12:24:44 2004 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Wed, 7 Apr 2004 12:24:44 -0700 Subject: Problem svgcoat 2004-04-07 12:24:43: back wash is not working Message-ID: From vilanova at snf.stanford.edu Wed Apr 7 13:51:46 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Apr 2004 13:51:46 -0700 Subject: Problem svgcoat 2004-04-07 10:59:30: EBR problem Message-ID: someone changed EBR arm program , please Do not change Arm Programs . From vilanova at snf.stanford.edu Wed Apr 7 13:52:52 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Apr 2004 13:52:52 -0700 Subject: Problem svgcoat 2004-04-07 12:24:43: back wash is not working Message-ID: Back wash Tested with Glass wafer , working Fine , ready to use. From adaven at snf.stanford.edu Sat Apr 10 01:23:31 2004 From: adaven at snf.stanford.edu (adaven at snf.stanford.edu) Date: Sat, 10 Apr 2004 01:23:31 -0700 Subject: Problem svgcoat 2004-04-10 01:23:30: cannot start process Message-ID: I'm a new user, and I can't seem to get the wafers to advance to the first step, almost like it's sensing another wafer is in the way (on the HMDS prime). No alarms. From alissa at snf.stanford.edu Sat Apr 10 12:35:54 2004 From: alissa at snf.stanford.edu (alissa at snf.stanford.edu) Date: Sat, 10 Apr 2004 12:35:54 -0700 Subject: Problem svgcoat 2004-04-10 12:35:52: same prime transfer problem; resist on hotplate Message-ID: I had the same problem as andrew, couldn't get wafers to transfer to prime station. Also noticed that hotplate has resist on it!! From vilanova at snf.stanford.edu Mon Apr 12 07:16:02 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Apr 2004 07:16:02 -0700 Subject: Problem svgcoat 2004-04-10 01:23:30: cannot start process Message-ID: Enable system , cycled wafers , no problem found. ok to use. From vilanova at snf.stanford.edu Mon Apr 12 07:16:22 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Apr 2004 07:16:22 -0700 Subject: Problem svgcoat 2004-04-10 12:35:52: same prime transfer problem; resist on hotplate Message-ID: Cleaned hotplate, cycled wafers ok to use. From parco at snf.stanford.edu Tue Apr 20 08:02:12 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Tue, 20 Apr 2004 08:02:12 -0700 Subject: Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS Message-ID: From vilanova at snf.stanford.edu Tue Apr 20 09:27:17 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 20 Apr 2004 09:27:17 -0700 Subject: Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS Message-ID: adjusted HMDS hotplate wafer speed in , cycled wafers ok to use. :-) From crichter at snf.stanford.edu Fri Apr 23 13:00:22 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 23 Apr 2004 13:00:22 -0700 Subject: Problem svgcoat 2004-04-23 13:00:20: 1st cool plate does not detect wafers Message-ID: From vilanova at snf.stanford.edu Fri Apr 23 13:28:31 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Apr 2004 13:28:31 -0700 Subject: Problem svgcoat 2004-04-23 13:00:20: 1st cool plate does not detect wafers Message-ID: someone had the HMDS plate on Manual mode and hte coater under auto mode, I reset them , Ok to use.