Problem svgcoat 2004-04-02 17:28:59: hmds track has crud on it

pethe at snf.stanford.edu pethe at snf.stanford.edu
Fri Apr 2 17:28:59 PST 2004


While running an svgcoat dummy, it got stuck to the hmds plate. On recovering the wafer, we found some resist on the back of the dummy. There is also a mark on the plate corresponding to the wafer location. Please be aware that this could potentially get onto the backside of your wafer.




More information about the svgcoat-pcs mailing list