Comment svgcoat 2004-03-30 23:15:54: the wafer stopped at the spinner
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Apr 5 07:30:57 PDT 2004
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Problem svgcoat 2004-04-02 17:28:59: hmds track has crud on it
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Problem svgcoat 2004-04-05 15:02:14: very very bad EBR.
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cleaned HMDS Hotplate , ok to use .
Previous message:
Problem svgcoat 2004-04-02 17:28:59: hmds track has crud on it
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Problem svgcoat 2004-04-05 15:02:14: very very bad EBR.
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