Problem svgcoat 2004-04-05 15:02:14: very very bad EBR.
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Mon Apr 5 15:02:15 PDT 2004
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Comment svgcoat 2004-03-30 23:15:54: the wafer stopped at the spinner
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Problem svgcoat 2004-04-05 15:02:14: very very bad EBR.
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almost in the center of wafers.
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Comment svgcoat 2004-03-30 23:15:54: the wafer stopped at the spinner
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Problem svgcoat 2004-04-05 15:02:14: very very bad EBR.
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