Problem svgcoat 2004-04-10 01:23:30: cannot start process
adaven at snf.stanford.edu
adaven at snf.stanford.edu
Sat Apr 10 01:23:31 PDT 2004
I'm a new user, and I can't seem to get the wafers to advance to the first step, almost like it's sensing another wafer is in the way (on the HMDS prime). No alarms.
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