Problem svgcoat 2004-04-10 01:23:30: cannot start process

adaven at snf.stanford.edu adaven at snf.stanford.edu
Sat Apr 10 01:23:31 PDT 2004


I'm a new user, and I can't seem to get the wafers to advance to the first step, almost like it's sensing another wafer is in the way (on the HMDS prime).  No alarms.




More information about the svgcoat-pcs mailing list