Problem svgcoat 2004-04-10 12:35:52: same prime transfer problem; resist on hotplate

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 12 07:16:22 PDT 2004

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Cleaned hotplate, cycled wafers ok to use.

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Next message: Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS
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