Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS
parco at snf.stanford.edu
parco at snf.stanford.edu
Tue Apr 20 08:02:12 PDT 2004
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Problem svgcoat 2004-04-10 12:35:52: same prime transfer problem; resist on hotplate
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Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS
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Problem svgcoat 2004-04-10 12:35:52: same prime transfer problem; resist on hotplate
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Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS
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