Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Apr 20 09:27:17 PDT 2004

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adjusted HMDS  hotplate  wafer speed in , cycled wafers
ok to use. :-)

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