Problem svgcoat 2004-04-23 13:00:20: 1st cool plate does not detect wafers
crichter at snf.stanford.edu
crichter at snf.stanford.edu
Fri Apr 23 13:00:22 PDT 2004
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Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS
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Problem svgcoat 2004-04-23 13:00:20: 1st cool plate does not detect wafers
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Shutdown svgcoat 2004-04-20 08:02:12: wafer not centering on track-hotplate & HMDS
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Problem svgcoat 2004-04-23 13:00:20: 1st cool plate does not detect wafers
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