Problem svgcoat 2004-04-23 13:00:20: 1st cool plate does not detect wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Apr 23 13:28:31 PDT 2004


someone had the HMDS plate on Manual mode and 
hte coater under auto mode, I  reset them , Ok to use. 




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