From martinez at snf.stanford.edu Mon Aug 2 16:37:44 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 2 Aug 2004 16:37:44 -0700 Subject: Problem svgcoat SNF 2004-07-30 12:52:34: EBR Message-ID: replaced ebr nozzle, adj pressure and flow cycled five wafers with good results. ready for use From me342e at snf.stanford.edu Tue Aug 3 00:23:34 2004 From: me342e at snf.stanford.edu (me342e at snf.stanford.edu) Date: Tue, 3 Aug 2004 00:23:34 -0700 Subject: Problem svgcoat SNF 2004-08-03 00:23:33: coater doesnot work Message-ID: Arm in the coater does not move at all. From vilanova at snf.stanford.edu Tue Aug 3 07:41:45 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Aug 2004 07:41:45 -0700 Subject: Problem svgcoat SNF 2004-08-03 00:23:33: coater doesnot work Message-ID: the arm wasnt working properly because someone pour or drop resist over the rail < cleaned up rail , cycled wafers , ALso please do not adjust or touch anything under the coater I notices someone had been playing with the EBR AGAIN! , ok to use . From mahnaz at snf.stanford.edu Tue Aug 3 11:00:17 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 3 Aug 2004 11:00:17 -0700 Subject: Problem svgcoat SNF 2004-08-03 11:00:16: bad EBR reported by lab member to me Message-ID: From martinez at snf.stanford.edu Tue Aug 3 13:17:02 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 3 Aug 2004 13:17:02 -0700 Subject: Problem svgcoat SNF 2004-08-03 11:00:16: bad EBR reported by lab member to me Message-ID: adj svgcoat ebr pressure to 38psi (was at 55psi) cycled wafers, ready for use From yeh at snf.stanford.edu Fri Aug 6 10:49:22 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 6 Aug 2004 10:49:22 -0700 Subject: Problem svgcoat SNF 2004-08-06 10:49:21: ebr causing solvent splatters Message-ID: From vilanova at snf.stanford.edu Fri Aug 6 14:36:32 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 6 Aug 2004 14:36:32 -0700 Subject: Problem svgcoat SNF 2004-08-06 10:49:21: ebr causing solvent splatters Message-ID: Adjusted EBR pressure and speed for program # 4 cycled wafers ok to use. From yeh at snf.stanford.edu Sat Aug 14 21:13:28 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Sat, 14 Aug 2004 21:13:28 -0700 Subject: Comment svgcoat SNF 2004-08-14 21:13:28: 5mm EBR problem Message-ID: 5mm EBR using prog 7 creates splatters on about 1 out of 4 wafers From yeh at snf.stanford.edu Wed Aug 18 00:39:13 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 18 Aug 2004 00:39:13 -0700 Subject: Comment svgcoat SNF 2004-08-18 00:39:13: 5mm EBR prog 7 splatters Message-ID: From vilanova at snf.stanford.edu Wed Aug 18 08:10:41 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Aug 2004 08:10:41 -0700 Subject: Comment svgcoat SNF 2004-08-14 21:13:28: 5mm EBR problem Message-ID: Adjusted EBR air pressure I Cycled 5 wafers on the 5 mm program and also de 2mm program, looks good , ok to use. From vilanova at snf.stanford.edu Wed Aug 18 08:11:23 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Aug 2004 08:11:23 -0700 Subject: Comment svgcoat SNF 2004-08-18 00:39:13: 5mm EBR prog 7 splatters Message-ID: Adjusted EBR air flow pressure , cycled wafers , no splatters ok to use.