Problem svgcoat SNF 2004-08-03 00:23:33: coater doesnot work

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Aug 3 07:41:45 PDT 2004


the arm wasnt working properly because someone
pour or drop  resist over the rail < cleaned up rail , cycled
wafers , ALso please  do not adjust or touch anything under 
the coater I notices someone had been playing with the
EBR AGAIN!  , ok to use . 




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