Problem svgcoat SNF 2004-08-03 11:00:16: bad EBR reported by lab member to me
martinez at snf.stanford.edu
martinez at snf.stanford.edu
Tue Aug 3 13:17:02 PDT 2004
adj svgcoat ebr pressure to 38psi (was at 55psi)
cycled wafers, ready for use
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