Comment svgcoat SNF 2004-08-14 21:13:28: 5mm EBR problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Aug 18 08:10:41 PDT 2004


Adjusted EBR air pressure I  Cycled 5 wafers on the 5 mm 
program and also de 2mm program, looks good , ok to use. 




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