From qchen at snf.stanford.edu Mon Feb 2 13:58:13 2004 From: qchen at snf.stanford.edu (qchen at snf.stanford.edu) Date: Mon, 2 Feb 2004 13:58:13 -0800 Subject: Problem svgcoat 2004-02-02 13:58:13: spin problem in Program 6 Message-ID: 1/31/04 When I was running coat program 6 on track 1 for SPR220-7resist, the wafe started to spin at the first two seconds and stopped after resist was dispensed. An alarm then sounded. Thanks! From martinez at snf.stanford.edu Mon Feb 2 15:09:47 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 2 Feb 2004 15:09:47 -0800 Subject: Problem svgcoat 2004-02-02 13:58:13: spin problem in Program 6 Message-ID: wrong arm program parameter. set up arm program, cycled wafers. coater completes cycle but uniformity is still out. From mahnaz at snf.stanford.edu Tue Feb 3 12:19:17 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 3 Feb 2004 12:19:17 -0800 Subject: Problem svgcoat 2004-02-03 12:19:17: 1.6 um prog.8 non uniform Message-ID: From martinez at snf.stanford.edu Tue Feb 3 13:47:10 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 3 Feb 2004 13:47:10 -0800 Subject: Problem svgcoat 2004-02-03 12:19:17: 1.6 um prog.8 non uniform Message-ID: purged air bubbles from resist line cleaned nozzle cycled wafers. ready for use From lindaw at snf.stanford.edu Thu Feb 5 06:41:48 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 5 Feb 2004 06:41:48 -0800 Subject: Problem svgcoat 2004-02-05 06:41:47: won't accept wafers to spin chuck in PGM 2 Message-ID: From vilanova at snf.stanford.edu Thu Feb 5 08:08:11 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Feb 2004 08:08:11 -0800 Subject: Problem svgcoat 2004-02-05 06:41:47: won't accept wafers to spin chuck in PGM 2 Message-ID: checked program # 2 cycled wafers, couldnt repeat the problem , ok to use. From sjo at snf.stanford.edu Tue Feb 10 22:57:32 2004 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Tue, 10 Feb 2004 22:57:32 -0800 Subject: Problem svgcoat 2004-02-10 22:57:32: EBR, HMDS level sensors disconnected?? Message-ID: Noting that track 1 had EBR problems, with the alarm going off in the wash step, I found that in the cabinet both the EBR and HMDS level sensors were disconnected. Upon reconnect, the EBR utility alarm went off, so I left track 1 with HMDS sensor connected, and EBR disconnected. From vilanova at snf.stanford.edu Wed Feb 11 08:05:42 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 11 Feb 2004 08:05:42 -0800 Subject: Problem svgcoat 2004-02-10 22:57:32: EBR, HMDS level sensors disconnected?? Message-ID: EBR and HMDS LEvels are fine, please do not connect or disconnect anything , if you see something wrong please , report it to maintenance , dont try to fix it yoiurself. From daesung at snf.stanford.edu Wed Feb 11 08:59:54 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 11 Feb 2004 08:59:54 -0800 Subject: Problem svgcoat 2004-02-11 08:59:53: Edge bead removal is not working Message-ID: From vilanova at snf.stanford.edu Wed Feb 11 11:30:27 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 11 Feb 2004 11:30:27 -0800 Subject: Problem svgcoat 2004-02-11 08:59:53: Edge bead removal is not working Message-ID: someone changed all the EBR and Arm programs , please do not change anything youre not supposed to . From harshal at snf.stanford.edu Tue Feb 17 13:05:13 2004 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Tue, 17 Feb 2004 13:05:13 -0800 Subject: Problem svgcoat 2004-02-17 13:05:12: wafer broke on the coater chuck.. Message-ID: From mtang at snf.stanford.edu Fri Feb 20 07:46:40 2004 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 20 Feb 2004 07:46:40 -0800 Subject: Comment svgcoat 2004-02-20 07:46:39: Diagostic mode Message-ID: When I came in, the system was in "diagnostic" mode. I take it that this is not standard procedure. From parco at snf.stanford.edu Sun Feb 29 08:01:14 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Sun, 29 Feb 2004 08:01:14 -0800 Subject: Shutdown svgcoat 2004-02-29 08:01:12: track 1is not functioning Message-ID: track 1 not raising the spin chuck and/or dispensing resist while priming program dispense (1)