Problem svgcoat 2004-02-02 13:58:13: spin problem in Program 6

qchen at snf.stanford.edu qchen at snf.stanford.edu
Mon Feb 2 13:58:13 PST 2004


1/31/04
When I was running coat program 6 on track 1 for SPR220-7resist, the wafe started to spin at the first two seconds and stopped after resist was dispensed.  An alarm then sounded.  Thanks!    




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