Problem svgcoat 2004-02-05 06:41:47: won't accept wafers to spin chuck in PGM 2

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Feb 5 08:08:11 PST 2004

Previous message: Problem svgcoat 2004-02-05 06:41:47: won't accept wafers to spin chuck in PGM 2
Next message: Problem svgcoat 2004-02-10 22:57:32: EBR, HMDS level sensors disconnected??
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

checked program # 2  cycled wafers, couldnt repeat the
problem , ok to use.

Previous message: Problem svgcoat 2004-02-05 06:41:47: won't accept wafers to spin chuck in PGM 2
Next message: Problem svgcoat 2004-02-10 22:57:32: EBR, HMDS level sensors disconnected??
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat-pcs mailing list