From bchui at snf.stanford.edu Mon Jan 5 17:24:44 2004 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 5 Jan 2004 17:24:44 -0800 Subject: Problem svgcoat 2004-01-05 17:24:43: prime station malfunction Message-ID: The prime station controller has 'forgotten' all its programs. Even after I re-entered program 1, it was acting strangely and alarming frequently. The coat station on the other hand seems to be working fine. From martinez at snf.stanford.edu Tue Jan 6 09:30:38 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 6 Jan 2004 09:30:38 -0800 Subject: Problem svgcoat 2004-01-05 17:24:43: prime station malfunction Message-ID: calibrated wafer transfer steps, cycled wafers, cleaned hot plate. From mahnaz at snf.stanford.edu Tue Jan 20 09:47:29 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 20 Jan 2004 09:47:29 -0800 Subject: Problem svgcoat 2004-01-20 09:47:27: 7 um is not uniform Message-ID: From vilanova at snf.stanford.edu Thu Jan 22 11:06:03 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 Jan 2004 11:06:03 -0800 Subject: Shutdown svgcoat 2004-01-22 11:06:03: Maintenance in progress .............. Message-ID: From martinez at snf.stanford.edu Fri Jan 23 11:01:13 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 23 Jan 2004 11:01:13 -0800 Subject: Problem svgcoat 2004-01-20 09:47:27: 7 um is not uniform Message-ID: track ok for 1um 3612. From martinez at snf.stanford.edu Fri Jan 23 11:02:25 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 23 Jan 2004 11:02:25 -0800 Subject: Shutdown svgcoat 2004-01-22 11:06:03: Maintenance in progress .............. Message-ID: track ok for 3612 1um pr From mahnaz at snf.stanford.edu Fri Jan 23 11:19:20 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 23 Jan 2004 11:19:20 -0800 Subject: Problem svgcoat 2004-01-23 11:19:20: I need to shut down this track Message-ID: 7 um not good 1 um is not good either From beckwith at snf.stanford.edu Fri Jan 23 12:56:43 2004 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Fri, 23 Jan 2004 12:56:43 -0800 Subject: Problem svgcoat 2004-01-23 12:56:42: 220 bad coat -- 7um Message-ID: the nozzle is sucking back a LOT of air, then when it dispenses it dispenses, air, pr, air, pr, etc., which is not enough pr to coat the whole wafer. Sometimes it then adds an additional drip after the air/pr dispense seems to be finished. LOTS of lumps, and non-uniformity. From martinez at snf.stanford.edu Fri Jan 23 13:42:06 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 23 Jan 2004 13:42:06 -0800 Subject: Problem svgcoat 2004-01-23 11:19:20: I need to shut down this track Message-ID: purged line, cleaned nozzle. cycled 4 test wafers resist uniformity is excellent. no problem found From mahnaz at snf.stanford.edu Mon Jan 26 09:40:52 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 26 Jan 2004 09:40:52 -0800 Subject: Shutdown svgcoat 2004-01-26 09:40:52: uts will work on 7 um pump Message-ID: From mahnaz at snf.stanford.edu Mon Jan 26 16:02:32 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 26 Jan 2004 16:02:32 -0800 Subject: Shutdown svgcoat 2004-01-26 09:40:52: uts will work on 7 um pump Message-ID: ok to use 1 um and 1.6 um . 7 um still not uniform, uts will be back tomorrow top work on the track. From mahnaz at snf.stanford.edu Mon Jan 26 16:03:23 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 26 Jan 2004 16:03:23 -0800 Subject: Problem svgcoat 2004-01-26 16:03:23: 7 um non uniform Message-ID: UTS will be in to work on it tomorrow.