Problem svgcoat 2004-01-23 12:56:42: 220 bad coat -- 7um

beckwith at snf.stanford.edu beckwith at snf.stanford.edu
Fri Jan 23 12:56:43 PST 2004


the nozzle is sucking back a LOT of air, then when it dispenses
it dispenses, air, pr, air, pr, etc., which is not enough pr to coat
the whole wafer. Sometimes it then adds an
additional drip after the air/pr dispense seems to be finished.
LOTS of lumps, and non-uniformity.




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