From ericp at snf.stanford.edu Thu Jul 8 19:55:51 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 8 Jul 2004 19:55:51 -0700 Subject: Problem svgcoat SNF 2004-07-08 19:55:50: 7 micron dispense poor Message-ID: the SPR220 DISP2 is very delayed in dispensing, resulting in resist not covering the center of the wafer. I've changed the bottle. Will try more.... From ericp at snf.stanford.edu Thu Jul 8 21:56:25 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 8 Jul 2004 21:56:25 -0700 Subject: Comment svgcoat SNF 2004-07-08 21:56:24: update on SPR220 Message-ID: After purging many many times, it seems to disp ok now. BUT, there's something wrong with the disp program, it dispenses ONCE, then hangs, then alarms. Then if you wait, you can run another dispense. From vilanova at snf.stanford.edu Fri Jul 9 07:33:13 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Jul 2004 07:33:13 -0700 Subject: Problem svgcoat SNF 2004-07-08 19:55:50: 7 micron dispense poor Message-ID: checked settings, ( settings are ok ) cleaned nozzle and dispense hose, cycled wafers , wafers look fine, ready to use. From vilanova at snf.stanford.edu Fri Jul 9 07:34:07 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Jul 2004 07:34:07 -0700 Subject: Comment svgcoat SNF 2004-07-08 21:56:24: update on SPR220 Message-ID: checked seetings , cleaned nozzle and dispense hose, cycled wafers , ( no alarms ) wafers look good. Ready to use. From martinez at snf.stanford.edu Thu Jul 15 09:08:15 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 15 Jul 2004 09:08:15 -0700 Subject: Shutdown svgcoat SNF 2004-07-15 09:08:11: shutdown Message-ID: shut down for cleaning From martinez at snf.stanford.edu Thu Jul 15 11:04:38 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 15 Jul 2004 11:04:38 -0700 Subject: Shutdown svgcoat SNF 2004-07-15 09:08:11: shutdown Message-ID: cleaned resist, weekly pm completed From yeh at snf.stanford.edu Fri Jul 16 04:25:23 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 16 Jul 2004 04:25:23 -0700 Subject: Problem svgcoat SNF 2004-07-16 04:25:23: ebr splatters solvent on wafer center Message-ID: From vilanova at snf.stanford.edu Fri Jul 16 07:45:49 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Jul 2004 07:45:49 -0700 Subject: Problem svgcoat SNF 2004-07-16 04:25:23: ebr splatters solvent on wafer center Message-ID: Adjusted EBR arm and flow , cycled several wafers, looks good ready to use. From naiqian at snf.stanford.edu Wed Jul 21 12:50:39 2004 From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu) Date: Wed, 21 Jul 2004 12:50:39 -0700 Subject: Problem svgcoat SNF 2004-07-21 12:50:38: the arm doesnot move to right position Message-ID: PR can't be poured on wafer From martinez at snf.stanford.edu Wed Jul 21 13:13:09 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 21 Jul 2004 13:13:09 -0700 Subject: Problem svgcoat SNF 2004-07-21 12:50:38: the arm doesnot move to right position Message-ID: arm program altered. setup arm 2 steps, cycled test wafer From lindaw at snf.stanford.edu Thu Jul 22 16:47:38 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 22 Jul 2004 16:47:38 -0700 Subject: Comment svgcoat SNF 2004-07-22 16:47:20: spinner very loud during spin Message-ID: Sounds like it is spinning way faster than the program shows. Bad bearing??? From wtpark at snf.stanford.edu Fri Jul 23 12:50:03 2004 From: wtpark at snf.stanford.edu (wtpark at snf.stanford.edu) Date: Fri, 23 Jul 2004 12:50:03 -0700 Subject: Problem svgcoat SNF 2004-07-23 12:49:53: large jittery sound when it spins Message-ID: From martinez at snf.stanford.edu Fri Jul 23 14:23:17 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 23 Jul 2004 14:23:17 -0700 Subject: Problem svgcoat SNF 2004-07-23 12:49:53: large jittery sound when it spins Message-ID: replaced and calibrated spindle, weekly pm completed From martinez at snf.stanford.edu Fri Jul 23 14:23:31 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 23 Jul 2004 14:23:31 -0700 Subject: Comment svgcoat SNF 2004-07-22 16:47:20: spinner very loud during spin Message-ID: replaced spindle From ahuang06 at snf.stanford.edu Tue Jul 27 11:34:14 2004 From: ahuang06 at snf.stanford.edu (ahuang06 at snf.stanford.edu) Date: Tue, 27 Jul 2004 11:34:14 -0700 Subject: Problem svgcoat SNF 2004-07-27 11:34:13: transfer loses wafers before bake Message-ID: sometimes the wafer will "fall off" the track, resulting in damage to the wafer after it is done with the first station and is being lifted out of the rinse/spin area From vilanova at snf.stanford.edu Tue Jul 27 14:04:12 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Jul 2004 14:04:12 -0700 Subject: Problem svgcoat SNF 2004-07-27 11:34:13: transfer loses wafers before bake Message-ID: cycled several wafers I couldnt repeat the problem , Operator error , ok to use. From ahuang06 at snf.stanford.edu Fri Jul 30 12:52:34 2004 From: ahuang06 at snf.stanford.edu (ahuang06 at snf.stanford.edu) Date: Fri, 30 Jul 2004 12:52:34 -0700 Subject: Problem svgcoat SNF 2004-07-30 12:52:34: EBR Message-ID: The Edge Bead REmoval seems to be sputtering a little on Track 1, so the coat becomes a little uneven and has a few pinholes.