Problem svgcoat SNF 2004-07-08 19:55:50: 7 micron dispense poor

ericp at snf.stanford.edu ericp at snf.stanford.edu
Thu Jul 8 19:55:51 PDT 2004


the SPR220 DISP2 is very delayed in 
dispensing, resulting in 
resist not covering the center of the wafer. 
I've changed the bottle.  Will try more....




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