Problem svgcoat SNF 2004-07-08 19:55:50: 7 micron dispense poor
ericp at snf.stanford.edu
ericp at snf.stanford.edu
Thu Jul 8 19:55:51 PDT 2004
the SPR220 DISP2 is very delayed in
dispensing, resulting in
resist not covering the center of the wafer.
I've changed the bottle. Will try more....
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