Shutdown svgcoat SNF 2004-07-15 09:08:11: shutdown
martinez at snf.stanford.edu
martinez at snf.stanford.edu
Thu Jul 15 11:04:38 PDT 2004
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Shutdown svgcoat SNF 2004-07-15 09:08:11: shutdown
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cleaned resist, weekly pm completed
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Shutdown svgcoat SNF 2004-07-15 09:08:11: shutdown
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Problem svgcoat SNF 2004-07-16 04:25:23: ebr splatters solvent on wafer center
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