Problem svgcoat SNF 2004-07-27 11:34:13: transfer loses wafers before bake
ahuang06 at snf.stanford.edu
ahuang06 at snf.stanford.edu
Tue Jul 27 11:34:14 PDT 2004
sometimes the wafer will "fall off" the track, resulting in damage to the wafer after it is done with the first station and is being lifted out of the rinse/spin area
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