Problem svgcoat SNF 2004-07-27 11:34:13: transfer loses wafers before bake

ahuang06 at snf.stanford.edu ahuang06 at snf.stanford.edu
Tue Jul 27 11:34:14 PDT 2004


sometimes the wafer will "fall off" the track, resulting in damage to the wafer after it is done with the first station and is being lifted out of the rinse/spin area




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