From ratiug at snf.stanford.edu  Sun Jun 27 21:51:04 2004
From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu)
Date: Sun, 27 Jun 2004 21:51:04 -0700
Subject: Problem svgcoat SNF 2004-06-27 21:51:03: stop tranfering
Message-ID: <mailman.730.1357938703.25882.svgcoat-pcs@snf.stanford.edu>

there is no action after I press start.



From vilanova at snf.stanford.edu  Mon Jun 28 07:26:32 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 28 Jun 2004 07:26:32 -0700
Subject: Problem svgcoat SNF 2004-06-27 21:51:03: stop tranfering
Message-ID: <mailman.731.1357938703.25882.svgcoat-pcs@snf.stanford.edu>

Operator error ( probably forgot to enable) Cycled wafers,
Ready to go . 



From yeh at snf.stanford.edu  Tue Jun 29 18:41:08 2004
From: yeh at snf.stanford.edu (yeh at snf.stanford.edu)
Date: Tue, 29 Jun 2004 18:41:08 -0700
Subject: Problem svgcoat SNF 2004-06-29 18:41:07: pr coat uniformity problem
Message-ID: <mailman.732.1357938703.25882.svgcoat-pcs@snf.stanford.edu>

I am getting uneven pr spots on my wafer when I use EBR.  The PR coat is very clean and uniform when I don't use EBR.  I noticed that the acetone line seems to have bubbles when it dispenses and wonder if this could be the problem.



From vilanova at snf.stanford.edu  Wed Jun 30 07:47:32 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 30 Jun 2004 07:47:32 -0700
Subject: Problem svgcoat SNF 2004-06-29 18:41:07: pr coat uniformity problem
Message-ID: <mailman.733.1357938703.25882.svgcoat-pcs@snf.stanford.edu>

cleaned EBR Nozzle, adjusted EBR Flow cycled Wafers,
ok to use.