Problem svgcoat SNF 2004-06-29 18:41:07: pr coat uniformity problem

yeh at snf.stanford.edu yeh at snf.stanford.edu
Tue Jun 29 18:41:08 PDT 2004


I am getting uneven pr spots on my wafer when I use EBR.  The PR coat is very clean and uniform when I don't use EBR.  I noticed that the acetone line seems to have bubbles when it dispenses and wonder if this could be the problem.




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