From vilanova at snf.stanford.edu Mon Mar 1 07:12:07 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Mar 2004 07:12:07 -0800 Subject: Shutdown svgcoat 2004-02-29 08:01:12: track 1is not functioning Message-ID: track 1 was working when I got here this morning, I guess someone forgot to empty the resist waste container ( the one in the bottom ). From mlacolle at snf.stanford.edu Mon Mar 1 17:38:26 2004 From: mlacolle at snf.stanford.edu (mlacolle at snf.stanford.edu) Date: Mon, 1 Mar 2004 17:38:26 -0800 Subject: Shutdown svgcoat 2004-03-01 17:38:24: resist and acetone on the chuck Message-ID: My wafer got stuck on the chuck and some resist and acetone were spilled on the chuck when we tried to recover the wafer. The wafer was stuck because I stopped the coater. The reason is that the wafer fell way off center of the chuck and the spinning might have ejected it. From cbellew at snf.stanford.edu Mon Mar 1 18:08:24 2004 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Mon, 1 Mar 2004 18:08:24 -0800 Subject: Shutdown svgcoat 2004-03-01 17:38:24: resist and acetone on the chuck Message-ID: I removed the chuck and cleaned it thoroughly. Track seems to be working fine now. From cbellew at snf.stanford.edu Mon Mar 1 18:13:04 2004 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Mon, 1 Mar 2004 18:13:04 -0800 Subject: Problem svgcoat 2004-03-01 18:13:04: Wafer not always centered on spin chuck Message-ID: I cleared a shutdown on the track reported as resist and acetone on the chuck because I removed the chuck and cleaned it thoroughly. But I didn't look into the other issue which was that the users wafer was off center. Alignment of the wafer to the chuck needs to be checked. From vilanova at snf.stanford.edu Thu Mar 4 11:19:55 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Mar 2004 11:19:55 -0800 Subject: Problem svgcoat 2004-03-01 18:13:04: Wafer not always centered on spin chuck Message-ID: replaced spindle , cleaned catch cup, cleaned hotplates, lube dispense arm, cycled wafers , ok to use. From mahnaz at snf.stanford.edu Fri Mar 5 11:19:41 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 5 Mar 2004 11:19:41 -0800 Subject: Problem svgcoat 2004-03-05 11:19:40: Bad ebr Message-ID: ebr splash, inconsistant ebr 2-7 mm. From vilanova at snf.stanford.edu Fri Mar 5 14:06:31 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:06:31 -0800 Subject: Problem svgcoat 2004-03-05 11:19:40: Bad ebr Message-ID: checked EBR , cycled wafers , I couldnt repat the problem Ok to use . From vilanova at snf.stanford.edu Fri Mar 5 14:07:35 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:07:35 -0800 Subject: Problem svgcoat 2004-02-17 13:05:12: wafer broke on the coater chuck.. Message-ID: removed broken wafer from catch cup, ready to use. From vilanova at snf.stanford.edu Fri Mar 5 14:07:58 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Mar 2004 14:07:58 -0800 Subject: Comment svgcoat 2004-02-20 07:46:39: Diagostic mode Message-ID: checked system , cycled wafers , ok to use. From mahnaz at snf.stanford.edu Tue Mar 9 14:19:16 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Mar 2004 14:19:16 -0800 Subject: Problem svgcoat 2004-01-26 16:03:23: 7 um non uniform Message-ID: pump, nozzel and controller has been changed and recipe has been modified. From mahnaz at snf.stanford.edu Tue Mar 9 14:19:55 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Mar 2004 14:19:55 -0800 Subject: Problem svgcoat 2004-01-23 12:56:42: 220 bad coat -- 7um Message-ID: pump, controller has been changed and recipe has been modified. From phimmer at snf.stanford.edu Tue Mar 23 16:03:25 2004 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Tue, 23 Mar 2004 16:03:25 -0800 Subject: Problem svgcoat 2004-03-23 16:03:20: edge bead removal-arm6 Message-ID: The edge bead arm6 removes ~6mm of resist, it should be 2mm. From vilanova at snf.stanford.edu Wed Mar 24 09:39:12 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Mar 2004 09:39:12 -0800 Subject: Problem svgcoat 2004-03-23 16:03:20: edge bead removal-arm6 Message-ID: Adjusted EBR Arm position , cycled wafers, ok to use. From naiqian at snf.stanford.edu Sun Mar 28 06:28:07 2004 From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu) Date: Sun, 28 Mar 2004 06:28:07 -0800 Subject: Problem svgcoat 2004-03-28 06:28:06: wafer stop transfering at oven(cool plate) Message-ID: From vilanova at snf.stanford.edu Mon Mar 29 07:56:55 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Mar 2004 07:56:55 -0800 Subject: Problem svgcoat 2004-03-28 06:28:06: wafer stop transfering at oven(cool plate) Message-ID: Cycled wafers cool plate working fine , I couldnt repeat the problem , ready to use. From martinez at snf.stanford.edu Mon Mar 29 16:50:52 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 29 Mar 2004 16:50:52 -0800 Subject: Problem svgcoat 2004-03-29 16:50:52: splashback Message-ID: ebr splash back on all programs. please use track 2 for ebr programs From adaven at snf.stanford.edu Tue Mar 30 05:22:14 2004 From: adaven at snf.stanford.edu (adaven at snf.stanford.edu) Date: Tue, 30 Mar 2004 05:22:14 -0800 Subject: Problem svgcoat 2004-03-30 05:22:13: Message-ID: From rcrane at snf.stanford.edu Tue Mar 30 14:48:28 2004 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Tue, 30 Mar 2004 14:48:28 -0800 Subject: Problem svgcoat 2004-03-30 05:22:13: Message-ID: From xiajing at snf.stanford.edu Tue Mar 30 23:15:55 2004 From: xiajing at snf.stanford.edu (xiajing at snf.stanford.edu) Date: Tue, 30 Mar 2004 23:15:55 -0800 Subject: Comment svgcoat 2004-03-30 23:15:54: the wafer stopped at the spinner Message-ID: