Shutdown svgcoat 2004-03-01 17:38:24: resist and acetone on the chuck

mlacolle at snf.stanford.edu mlacolle at snf.stanford.edu
Mon Mar 1 17:38:26 PST 2004


My wafer got stuck on the chuck and some resist and acetone were spilled on the chuck when we tried to recover the wafer.
The wafer was stuck because I stopped the coater. The reason is that the wafer fell way off center of the chuck and the spinning might have ejected it.




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