Shutdown svgcoat 2004-03-01 17:38:24: resist and acetone on the chuck

[mlacolle at snf.stanford.edu]

My wafer got stuck on the chuck and some resist and acetone were spilled on the chuck when we tried to recover the wafer.
The wafer was stuck because I stopped the coater. The reason is that the wafer fell way off center of the chuck and the spinning might have ejected it.