Problem svgcoat 2004-03-01 18:13:04: Wafer not always centered on spin chuck

cbellew at snf.stanford.edu cbellew at snf.stanford.edu
Mon Mar 1 18:13:04 PST 2004


I cleared a shutdown on the track reported as resist and acetone on the chuck because I removed the chuck and cleaned it thoroughly.  But I didn't look into the other issue which was that the users wafer was off center.  Alignment of the wafer to the chuck needs to be checked.




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