Problem svgcoat 2004-03-05 11:19:40: Bad ebr
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Fri Mar 5 11:19:41 PST 2004
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Problem svgcoat 2004-03-01 18:13:04: Wafer not always centered on spin chuck
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Problem svgcoat 2004-03-05 11:19:40: Bad ebr
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ebr splash, inconsistant ebr 2-7 mm.
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Problem svgcoat 2004-03-01 18:13:04: Wafer not always centered on spin chuck
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Problem svgcoat 2004-03-05 11:19:40: Bad ebr
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