Comment svgcoat 2004-02-20 07:46:39: Diagostic mode
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Mar 5 14:07:58 PST 2004
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Problem svgcoat 2004-02-17 13:05:12: wafer broke on the coater chuck..
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Problem svgcoat 2004-01-26 16:03:23: 7 um non uniform
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checked system , cycled wafers , ok to use.
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Problem svgcoat 2004-02-17 13:05:12: wafer broke on the coater chuck..
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Problem svgcoat 2004-01-26 16:03:23: 7 um non uniform
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