Problem svgcoat 2004-03-23 16:03:20: edge bead removal-arm6

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 24 09:39:12 PST 2004

Previous message: Problem svgcoat 2004-03-23 16:03:20: edge bead removal-arm6
Next message: Problem svgcoat 2004-03-28 06:28:06: wafer stop transfering at oven(cool plate)
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Adjusted EBR Arm position , cycled wafers, ok 
to use.

Previous message: Problem svgcoat 2004-03-23 16:03:20: edge bead removal-arm6
Next message: Problem svgcoat 2004-03-28 06:28:06: wafer stop transfering at oven(cool plate)
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat-pcs mailing list