March 2004 Archives by thread

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Starting: Mon Mar 1 07:12:07 PST 2004
Ending: Tue Mar 30 23:15:55 PST 2004
Messages: 19

• Shutdown svgcoat 2004-02-29 08:01:12: track 1is not functioning   vilanova at snf.stanford.edu
• Shutdown svgcoat 2004-03-01 17:38:24: resist and acetone on the chuck   mlacolle at snf.stanford.edu
  • Shutdown svgcoat 2004-03-01 17:38:24: resist and acetone on the chuck   cbellew at snf.stanford.edu
• Problem svgcoat 2004-03-01 18:13:04: Wafer not always centered on spin chuck   cbellew at snf.stanford.edu
  • Problem svgcoat 2004-03-01 18:13:04: Wafer not always centered on spin chuck   vilanova at snf.stanford.edu
• Problem svgcoat 2004-03-05 11:19:40: Bad ebr   mahnaz at snf.stanford.edu
  • Problem svgcoat 2004-03-05 11:19:40: Bad ebr   vilanova at snf.stanford.edu
• Problem svgcoat 2004-02-17 13:05:12: wafer broke on the coater chuck..   vilanova at snf.stanford.edu
• Comment svgcoat 2004-02-20 07:46:39: Diagostic mode   vilanova at snf.stanford.edu
• Problem svgcoat 2004-01-26 16:03:23: 7 um non uniform   mahnaz at snf.stanford.edu
• Problem svgcoat 2004-01-23 12:56:42: 220 bad coat -- 7um   mahnaz at snf.stanford.edu
• Problem svgcoat 2004-03-23 16:03:20: edge bead removal-arm6   phimmer at snf.stanford.edu
  • Problem svgcoat 2004-03-23 16:03:20: edge bead removal-arm6   vilanova at snf.stanford.edu
• Problem svgcoat 2004-03-28 06:28:06: wafer stop transfering at oven(cool plate)   naiqian at snf.stanford.edu
  • Problem svgcoat 2004-03-28 06:28:06: wafer stop transfering at oven(cool plate)   vilanova at snf.stanford.edu
• Problem svgcoat 2004-03-29 16:50:52: splashback   martinez at snf.stanford.edu
• Problem svgcoat 2004-03-30 05:22:13:   adaven at snf.stanford.edu
  • Problem svgcoat 2004-03-30 05:22:13:   rcrane at snf.stanford.edu
• Comment svgcoat 2004-03-30 23:15:54: the wafer stopped at the spinner   xiajing at snf.stanford.edu

Last message date: Tue Mar 30 23:15:55 PST 2004
Archived on: Fri Jan 11 13:12:08 PST 2013

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