From mwiemer at snf.stanford.edu  Tue May  4 17:30:23 2004
From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu)
Date: Tue, 4 May 2004 17:30:23 -0700
Subject: Problem svgcoat 2004-05-04 17:30:23: track1 not aligned
Message-ID: <mailman.722.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

The first track is not aligned properly. The wafers are not centered on the spinner head.
-Mike



From me342e at snf.stanford.edu  Tue May  4 23:15:30 2004
From: me342e at snf.stanford.edu (me342e at snf.stanford.edu)
Date: Tue, 4 May 2004 23:15:30 -0700
Subject: Problem svgcoat 2004-05-04 23:15:29: broken wafer
Message-ID: <mailman.723.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

wafer fell off chuck and broke while transfering from track to spin chamber. Cleaned up most, but still some small pieces left in chamber. 



From vilanova at snf.stanford.edu  Wed May  5 07:37:26 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 5 May 2004 07:37:26 -0700
Subject: Problem svgcoat 2004-05-04 17:30:23: track1 not aligned
Message-ID: <mailman.724.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

wafer chuck aligned cleaned chuck and belts, removed 
broken wafer , cycled several wafers, ok to use.  :-)



From vilanova at snf.stanford.edu  Wed May  5 07:38:05 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 5 May 2004 07:38:05 -0700
Subject: Problem svgcoat 2004-05-04 23:15:29: broken wafer
Message-ID: <mailman.725.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

removed wafer pieces cleaned chuck and belts , adjusted 
wafer chuck, cycled wafers , ok to use. :-) 



From rubenluo at snf.stanford.edu  Sat May 15 21:05:39 2004
From: rubenluo at snf.stanford.edu (rubenluo at snf.stanford.edu)
Date: Sat, 15 May 2004 21:05:39 -0700
Subject: Shutdown svgcoat 2004-05-15 21:05:38: some problem
Message-ID: <mailman.726.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

there is some problem in the machine and it has been shut down. I have called mario to see what the problem is.



From vilanova at snf.stanford.edu  Sat May 15 21:29:15 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Sat, 15 May 2004 21:29:15 -0700
Subject: Shutdown svgcoat 2004-05-15 21:05:38: some problem
Message-ID: <mailman.727.1357938702.25882.svgcoat-pcs@snf.stanford.edu>

re-initialized coater , no problems after hard reset done , ready to use :-) 



From jhemanth at snf.stanford.edu  Sun May 23 08:39:27 2004
From: jhemanth at snf.stanford.edu (jhemanth at snf.stanford.edu)
Date: Sun, 23 May 2004 08:39:27 -0700
Subject: Problem svgcoat 2004-05-23 08:39:27: Track 1 Drain Full
Message-ID: <mailman.728.1357938703.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon May 24 06:58:46 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 24 May 2004 06:58:46 -0700
Subject: Problem svgcoat 2004-05-23 08:39:27: Track 1 Drain Full
Message-ID: <mailman.729.1357938703.25882.svgcoat-pcs@snf.stanford.edu>

All you got to do in this case is push # 1 ( drain ) the top button on the right hand side. ok to use now .