From jzheng at snf.stanford.edu Mon Nov 1 23:49:09 2004 From: jzheng at snf.stanford.edu (jzheng at snf.stanford.edu) Date: Mon, 1 Nov 2004 23:49:09 -0800 Subject: Shutdown svgcoat SNF 2004-11-01 23:49:08: Prime heater shows 880C!!! Message-ID: From vilanova at snf.stanford.edu Tue Nov 2 07:21:01 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Nov 2004 07:21:01 -0800 Subject: Shutdown svgcoat SNF 2004-11-01 23:49:08: Prime heater shows 880C!!! Message-ID: someone jammed the HMDS temperature controller , I 'll leave this one under yelllow light because the rest of the system is working I will see if we have another controller in the basement, I found both track shutdown from the main power, DO NOT POWER IT DOWN !!! , just report it or call us and we'll take care if it. From vilanova at snf.stanford.edu Tue Nov 2 07:21:19 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Nov 2004 07:21:19 -0800 Subject: Problem svgcoat SNF 2004-11-02 07:21:18: JAmmed temperature controller. Message-ID: From vilanova at snf.stanford.edu Wed Nov 3 11:26:58 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Nov 2004 11:26:58 -0800 Subject: Problem svgcoat SNF 2004-11-02 07:21:18: JAmmed temperature controller. Message-ID: Replaced and calibrated HMDS Temperature COntroller. From yiching at snf.stanford.edu Tue Nov 9 18:00:27 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Tue, 9 Nov 2004 18:00:27 -0800 Subject: Problem svgcoat SNF 2004-11-09 18:00:26: a piece of the track fell off Message-ID: a metal strip fell off of the hot plate track during my run. I placed it next to track. From vilanova at snf.stanford.edu Wed Nov 10 07:16:21 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 10 Nov 2004 07:16:21 -0800 Subject: Problem svgcoat SNF 2004-11-09 18:00:26: a piece of the track fell off Message-ID: hotplate belt metal cover adjusted, ready to use. From caudillo at snf.stanford.edu Mon Nov 15 16:35:09 2004 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Mon, 15 Nov 2004 16:35:09 -0800 Subject: Comment svgcoat SNF 2004-11-15 16:35:09: 3612 resist changed Message-ID: I have done about 10 Auto-Dispense recipes using dispense #1 and there is still some very minor air bubbles coming out. Beware From vilanova at snf.stanford.edu Tue Nov 16 09:31:28 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Nov 2004 09:31:28 -0800 Subject: Comment svgcoat SNF 2004-11-15 16:35:09: 3612 resist changed Message-ID: Purged line, cycled wafers, ok to use. From xiajing at snf.stanford.edu Sat Nov 20 21:50:35 2004 From: xiajing at snf.stanford.edu (xiajing at snf.stanford.edu) Date: Sat, 20 Nov 2004 21:50:35 -0800 Subject: Comment svgcoat SNF 2004-11-20 21:50:35: some one's broken wafer in spiner Message-ID: From xiajing at snf.stanford.edu Sat Nov 20 21:52:19 2004 From: xiajing at snf.stanford.edu (xiajing at snf.stanford.edu) Date: Sat, 20 Nov 2004 21:52:19 -0800 Subject: Problem svgcoat SNF 2004-11-20 21:52:18: some one's broken wafer in spinner Message-ID: From lindaw at snf.stanford.edu Sun Nov 21 08:22:00 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 21 Nov 2004 08:22:00 -0800 Subject: Problem svgcoat SNF 2004-11-21 08:21:59: track 1 vapor prime temp 131C instead of 125C Message-ID: Someone has raised the vapor prime chuck temp to 131C. From vilanova at snf.stanford.edu Mon Nov 22 07:03:13 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Nov 2004 07:03:13 -0800 Subject: Comment svgcoat SNF 2004-11-20 21:50:35: some one's broken wafer in spiner Message-ID: removed broken wafer , ok to use. From vilanova at snf.stanford.edu Mon Nov 22 07:03:32 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Nov 2004 07:03:32 -0800 Subject: Problem svgcoat SNF 2004-11-20 21:52:18: some one's broken wafer in spinner Message-ID: removed broken wafer , ok to use. From vilanova at snf.stanford.edu Mon Nov 22 07:03:59 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Nov 2004 07:03:59 -0800 Subject: Problem svgcoat SNF 2004-11-21 08:21:59: track 1 vapor prime temp 131C instead of 125C Message-ID: adjusted vapor prime temperature, ok to use. From tejask at snf.stanford.edu Mon Nov 22 20:05:05 2004 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Mon, 22 Nov 2004 20:05:05 -0800 Subject: Problem svgcoat SNF 2004-11-22 20:05:05: drain error Message-ID: The drain light/alarm is on. There are also several broken wafer pieces in the coater. From tejask at snf.stanford.edu Mon Nov 22 20:07:12 2004 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Mon, 22 Nov 2004 20:07:12 -0800 Subject: Shutdown svgcoat SNF 2004-11-22 20:07:12: drain error Message-ID: Drain light/alarm is on. Several broken wafer pieces are lying in the coater. From vilanova at snf.stanford.edu Tue Nov 23 07:11:04 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 23 Nov 2004 07:11:04 -0800 Subject: Problem svgcoat SNF 2004-11-22 20:05:05: drain error Message-ID: emptied drain "PUSHING DOWN THE DRAIN # 1 BUTTON ON THE TOP RIGH THAND CORNER" ok to use now. From vilanova at snf.stanford.edu Tue Nov 23 07:11:26 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 23 Nov 2004 07:11:26 -0800 Subject: Shutdown svgcoat SNF 2004-11-22 20:07:12: drain error Message-ID: emptied drain , ok to use. From sanli at snf.stanford.edu Wed Nov 24 10:44:53 2004 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Wed, 24 Nov 2004 10:44:53 -0800 Subject: Problem svgcoat SNF 2004-11-24 10:44:52: prime station has got photoresist Message-ID: I guess a dummy wafer with photoresist on the back was put rhtough the prime station. I shut down the prime station so that it cools down. From vilanova at snf.stanford.edu Wed Nov 24 11:06:48 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Nov 2004 11:06:48 -0800 Subject: Problem svgcoat SNF 2004-11-24 10:44:52: prime station has got photoresist Message-ID: cleaned hmds hotplate , ready to use. please make sure you dont run your wafers upside down . From carlos at snf.stanford.edu Wed Nov 24 13:04:23 2004 From: carlos at snf.stanford.edu (carlos at snf.stanford.edu) Date: Wed, 24 Nov 2004 13:04:23 -0800 Subject: Comment svgcoat SNF 2004-11-24 13:04:23: error message Message-ID: says upstream not ready on the prime output screen From lindaw at snf.stanford.edu Sat Nov 27 13:36:23 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 27 Nov 2004 13:36:23 -0800 Subject: Problem svgcoat SNF 2004-11-27 13:36:22: load indexer not loading wafers Message-ID: press start, and it just sits there. May be able to be used in manual mode. I will try that. From vossough at snf.stanford.edu Sun Nov 28 20:09:06 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Sun, 28 Nov 2004 20:09:06 -0800 Subject: Problem svgcoat SNF 2004-11-28 20:09:05: SPR220-10um poor dispensing. Does not cover wafer Message-ID: From vilanova at snf.stanford.edu Mon Nov 29 07:26:38 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Nov 2004 07:26:38 -0800 Subject: Comment svgcoat SNF 2004-11-24 13:04:23: error message Message-ID: adjusted hmds hotplate screws ( Aparently someone was trying to take apart :-( ) cycled wafers ready to use . From vilanova at snf.stanford.edu Mon Nov 29 07:27:06 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Nov 2004 07:27:06 -0800 Subject: Problem svgcoat SNF 2004-11-27 13:36:22: load indexer not loading wafers Message-ID: adjusted hmds hotplate, cycled wafers ok to use. From vilanova at snf.stanford.edu Mon Nov 29 07:28:14 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Nov 2004 07:28:14 -0800 Subject: Problem svgcoat SNF 2004-11-28 20:09:05: SPR220-10um poor dispensing. Does not cover wafer Message-ID: cycled wafers under SPR220 cleaned hose ,purged line , ok to use. From kevhuang at snf.stanford.edu Mon Nov 29 15:04:51 2004 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Mon, 29 Nov 2004 15:04:51 -0800 Subject: Problem svgcoat SNF 2004-11-29 15:04:50: won't initialize Message-ID: the system freezes after running the topside program From kevhuang at snf.stanford.edu Mon Nov 29 15:06:17 2004 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Mon, 29 Nov 2004 15:06:17 -0800 Subject: Problem svgcoat SNF 2004-11-29 15:06:13: plz ignore previous comment Message-ID: From vilanova at snf.stanford.edu Tue Nov 30 07:01:47 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 Nov 2004 07:01:47 -0800 Subject: Problem svgcoat SNF 2004-11-29 15:04:50: won't initialize Message-ID: wrong Equipment, User meant to say Ev Align , ok to use. From vilanova at snf.stanford.edu Tue Nov 30 07:02:02 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 Nov 2004 07:02:02 -0800 Subject: Problem svgcoat SNF 2004-11-29 15:06:13: plz ignore previous comment Message-ID: See previous comment.