From chozone at snf.stanford.edu Fri Oct 1 22:54:54 2004 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Fri, 1 Oct 2004 22:54:54 -0700 Subject: Shutdown svgcoat SNF 2004-10-01 22:54:53: Broken wafer is in the prime oven Message-ID: From vilanova at snf.stanford.edu Mon Oct 4 06:51:21 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 4 Oct 2004 06:51:21 -0700 Subject: Shutdown svgcoat SNF 2004-10-01 22:54:53: Broken wafer is in the prime oven Message-ID: removed broken wafer cleaned HMDS plate Cycled wafers , ready to use. From mahnaz at snf.stanford.edu Mon Oct 4 10:21:42 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 4 Oct 2004 10:21:42 -0700 Subject: Problem svgcoat SNF 2004-10-04 10:21:41: stuck, totally Message-ID: From vilanova at snf.stanford.edu Tue Oct 5 07:02:25 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 5 Oct 2004 07:02:25 -0700 Subject: Problem svgcoat SNF 2004-10-04 10:21:41: stuck, totally Message-ID: Checked system , working fine,cycled wafers, ok to use. From mwiemer at snf.stanford.edu Tue Oct 5 11:22:49 2004 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Tue, 5 Oct 2004 11:22:49 -0700 Subject: Problem svgcoat SNF 2004-10-05 11:22:49: wafer gets stuck Message-ID: wafer gets stuck going into the spin section of the track. See gladys for more info. -Mike From martinez at snf.stanford.edu Tue Oct 5 13:41:26 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 5 Oct 2004 13:41:26 -0700 Subject: Problem svgcoat SNF 2004-10-05 11:22:49: wafer gets stuck Message-ID: cycled 5 test wafers no problem found ok to use From mislam at snf.stanford.edu Fri Oct 8 15:57:01 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Fri, 8 Oct 2004 15:57:01 -0700 Subject: Problem svgcoat SNF 2004-10-08 15:57:00: Wafer chuch won't go down Message-ID: From martinez at snf.stanford.edu Fri Oct 8 16:27:42 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 8 Oct 2004 16:27:42 -0700 Subject: Problem svgcoat SNF 2004-10-08 15:57:00: Wafer chuch won't go down Message-ID: adj chuck vac sensor, cycled 5 wafers. ready for use From martinez at snf.stanford.edu Mon Oct 18 09:32:31 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 18 Oct 2004 09:32:31 -0700 Subject: Shutdown svgcoat SNF 2004-10-18 09:32:29: shutdown Message-ID: damaged vapor prime oring From martinez at snf.stanford.edu Mon Oct 18 10:07:09 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 18 Oct 2004 10:07:09 -0700 Subject: Shutdown svgcoat SNF 2004-10-18 09:32:29: shutdown Message-ID: changed to problem. From martinez at snf.stanford.edu Mon Oct 18 10:07:49 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 18 Oct 2004 10:07:49 -0700 Subject: Problem svgcoat SNF 2004-10-18 10:07:48: no HMDS Message-ID: vapor prime not availble. coat module ok to use From vilanova at snf.stanford.edu Mon Oct 18 11:15:07 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Oct 2004 11:15:07 -0700 Subject: Problem svgcoat SNF 2004-10-18 10:07:48: no HMDS Message-ID: replaced broken HMDS seal gasket. tested ok ready to use. From jzheng at snf.stanford.edu Thu Oct 21 23:06:19 2004 From: jzheng at snf.stanford.edu (jzheng at snf.stanford.edu) Date: Thu, 21 Oct 2004 23:06:19 -0700 Subject: Problem svgcoat SNF 2004-10-21 23:06:15: broken wafer piece found in spinner Message-ID: From vilanova at snf.stanford.edu Fri Oct 22 07:59:36 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Oct 2004 07:59:36 -0700 Subject: Problem svgcoat SNF 2004-10-21 23:06:15: broken wafer piece found in spinner Message-ID: cleaned & removed broken wafer, ok to use