From beckwith at snf.stanford.edu Wed Sep 1 12:33:04 2004 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Wed, 1 Sep 2004 12:33:04 -0700 Subject: Comment svgcoat SNF 2004-09-01 12:33:04: Hi Mario: I ran 17 wafers through, it did not Message-ID: drip on any of my wafers.. From kenney at snf.stanford.edu Wed Sep 8 16:35:27 2004 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Wed, 8 Sep 2004 16:35:27 -0700 Subject: Shutdown svgcoat SNF 2004-09-08 16:35:27: coater chuck is stuck Message-ID: The spin chuck doesn't seem to function properly. Won't lower when wafer present From vilanova at snf.stanford.edu Thu Sep 9 07:28:10 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Sep 2004 07:28:10 -0700 Subject: Comment svgcoat SNF 2004-09-01 12:33:04: Hi Mario: I ran 17 wafers through, it did not Message-ID: Found spindle full of resist , cleaned spindle cycled wafers, ready to use. From vilanova at snf.stanford.edu Thu Sep 9 07:28:38 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Sep 2004 07:28:38 -0700 Subject: Shutdown svgcoat SNF 2004-09-08 16:35:27: coater chuck is stuck Message-ID: found spindle full of resist, cleaned spindle cycled wafers ready to use. From izuleta at snf.stanford.edu Sat Sep 18 21:23:01 2004 From: izuleta at snf.stanford.edu (izuleta at snf.stanford.edu) Date: Sat, 18 Sep 2004 21:23:01 -0700 Subject: Problem svgcoat SNF 2004-09-18 21:23:01: AUTOMATIC TRANSPORT NOT WORKING Message-ID: ONLY COAT AND PRE-BAKE OVEN FUNCTIONAL USING MANUAL MODE From yetao at snf.stanford.edu Sun Sep 19 14:25:18 2004 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Sun, 19 Sep 2004 14:25:18 -0700 Subject: Comment svgcoat SNF 2004-09-19 14:25:18: restarted, problem removed Message-ID: From vilanova at snf.stanford.edu Mon Sep 20 07:28:35 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Sep 2004 07:28:35 -0700 Subject: Problem svgcoat SNF 2004-09-18 21:23:01: AUTOMATIC TRANSPORT NOT WORKING Message-ID: Operator error, track working fine. ok to use. From vilanova at snf.stanford.edu Mon Sep 20 07:29:20 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Sep 2004 07:29:20 -0700 Subject: Comment svgcoat SNF 2004-09-19 14:25:18: restarted, problem removed Message-ID: Operator error , track working fine , ready to use From parco at snf.stanford.edu Wed Sep 29 05:42:02 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Wed, 29 Sep 2004 05:42:02 -0700 Subject: Problem svgcoat SNF 2004-09-29 05:42:01: track 1 not dispensing resist Message-ID: program #2 not dispensing resist; stop at chuck, then nothing. check priming coat program dispense#1...working OK. From vilanova at snf.stanford.edu Wed Sep 29 07:47:18 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Sep 2004 07:47:18 -0700 Subject: Problem svgcoat SNF 2004-09-29 05:42:01: track 1 not dispensing resist Message-ID: cleaned resist from shaft , spindle, chuck,hotplate.and rails , cycled wafers , ready to use. From ynzhao at snf.stanford.edu Wed Sep 29 16:27:37 2004 From: ynzhao at snf.stanford.edu (ynzhao at snf.stanford.edu) Date: Wed, 29 Sep 2004 16:27:37 -0700 Subject: Problem svgcoat SNF 2004-09-29 16:27:36: svgcoat: photoresist on hotplate Message-ID: i put the dummy wafer upside down, so the hot plate now has photoresist stain on it. I am Sorry. From cbaxter at snf.stanford.edu Wed Sep 29 16:57:49 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 29 Sep 2004 16:57:49 -0700 Subject: Problem svgcoat SNF 2004-09-29 16:27:36: svgcoat: photoresist on hotplate Message-ID: cleaned up resist residue on hotplate. From vilanova at snf.stanford.edu Thu Sep 30 09:32:34 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 30 Sep 2004 09:32:34 -0700 Subject: Shutdown svgcoat SNF 2004-09-30 09:32:34: Under weekly PM Message-ID: Weekly PM in progress stay tuned................ From vilanova at snf.stanford.edu Thu Sep 30 10:41:21 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 30 Sep 2004 10:41:21 -0700 Subject: Shutdown svgcoat SNF 2004-09-30 09:32:34: Under weekly PM Message-ID: weekly Pm Completed, ( cleaned catch cup, spindle tube, belts hmds hotplate, post bake hotplate, lubricated spindle,cycled wafers ( cleaned dummy wafers ) , ready to use . :-)