Shutdown svgcoat SNF 2004-09-08 16:35:27: coater chuck is stuck

kenney at snf.stanford.edu kenney at snf.stanford.edu
Wed Sep 8 16:35:27 PDT 2004

Previous message: Comment svgcoat SNF 2004-09-01 12:33:04: Hi Mario: I ran 17 wafers through, it did not
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The spin chuck doesn't seem to function properly.
Won't lower when wafer present

Previous message: Comment svgcoat SNF 2004-09-01 12:33:04: Hi Mario: I ran 17 wafers through, it did not
Next message: Shutdown svgcoat SNF 2004-09-08 16:35:27: coater chuck is stuck
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